Larysa Degtyarova

PhD in Technical Sciences, Associate Professor

Poltava State Agrarian University

36003, str. Skovorody, 1/3, Poltava, Ukraine

Study of oxygen distribution along the length of silicon single crystals doped with components with different types of conductivity

28.11.2023

Anna Bulankina, Larysa Degtyarova
  • Keywords nanotechnology, semiconductor materials, microcircuits, doping components in single crystals, epitaxial layer, directional crystallization methods, Czochralskii method, gravitational convection
  • DOI https://doi.org/10.31649/2413-4503-2023-18-2-25-31